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0242-36515 RTP XE Chamber Temperature Match KitversusAlpha 8 S

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Tokyo Electron Alpha 8 S, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0242-36515 RTP XE Chamber Temperature Match KitApplied Materials
Alpha 8 STokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tokyo Electron Alpha
Cited variants—
  • BBR3 DOPE[1]
  • WELL DRIVE HT FIELD OX[2]
  • D2 ANNEAL[3]
  • DENSIFICATION[4]
  • FSG ANNEAL[5]
Specifications
Configuration—BBR3 DOPE[1]
Process—POCL3[8]
Vintage—1999
Furnaces / Diffusion Vintage—1999
Wafer Size—8 inch[1]
0242-36515 RTP XE Chamber Temperature Match Kit entryAlpha 8 S entryAsk about these tools →Share experience with this comparison →

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Sources (8)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing