Waferpedia

Comparison ledger

0242-36515 RTP XE Chamber Temperature Match Kitversus2000

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Lindberg 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
2000Lindberg
OEMApplied MaterialsLindberg
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lindberg 2000
Specifications
Configuration—3 zones[1]
Zones—3[1]
Tube size—6 in tubes[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing