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Comparison ledger

0242-36515 RTP XE Chamber Temperature Match KitversusDrying

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Blue M Drying, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
DryingBlue M
OEMApplied MaterialsBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Blue M Drying
Cited variants—
  • OV-8A Drying Oven[1]
Specifications
Equipment type—Drying oven[2]
Model designation—-[2]
Variant designation—OV-8A Drying Oven[1]
Power Selector low setting—up to 120°C (248°F)[1]
Power Selector medium setting—120°C to 180°C (356°F)[1]
Power Selector high setting—180°C to 260°C (500°F)[1]
Explosion-proof—Not explosion proof[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]wiki.nanofab.usc.eduwiki.nanofab.usc.edu
  2. [2]Equipment inventory listing