Waferpedia

Comparison ledger

0041-39086 ESC PartversusNE 5700

Applied Materials 0041-39086 ESC Part, Ulvac NE 5700, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
NE 5700Ulvac
OEMApplied MaterialsUlvac
CategoryEtchEtch
Wafer size—Wafer Equipment
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Ulvac NE-5700
Specifications
Wafer size—Wafer Equipment[1]
Wafer Size—150mm[1]
Category—Etch[1]
Process—Metal Etcher[1]
Equipment—Dry Etcher[1]
Make—Ulvac[2]
Model—NE 5700[2]
Equipment type—Etcher[2]
Application—Dry etching system for production[3]
Cluster Configuration—Up to two process chambers[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]dealer listingwotol.com
  2. [2]Equipment inventory listing
  3. [3]ulvac.euulvac.eu