Comparison ledger
Applied Materials 0041-39086 ESC Part, Lam Research 9600 TCP Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | 9600 TCP MetalLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research TCP 9600 |
| Specifications | ||
| Configuration | — | with 3 HALO generators[1] |
| Plasma source | — | Transformer Coupled Plasma (TCP)[2] |
| Wafer size compatibility | — | 6-inch (150mm) and 8-inch (200mm)[2] |
| Chuck type | — | Ceramic ESC with helium backside cooling[2] |
| Endpoint control | — | Optical Emission Spectroscopy (OES)[2] |
| Automation interface | — | SECS/GEM Protocol[2] |
| Process chamber | — | Anodized aluminum, quartz-lined[2] |
| Typical etch targets | — | Al, TiN, Cu, W, Oxide, Nitride, Poly[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →