Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura I Phase II Oxide

Applied Materials 0041-39086 ESC Part, Applied Materials Centura I Phase II Oxide, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura I Phase II OxideApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura
Specifications
Configuration—Upgradable to 8"[1]
Need to replace—5-phase motor driver, indexer, turbo pump and controller, e-chuck, MFC's[1]
Wafer size (original)—6 inch[1]
Wafer size (upgrade target)—8 inch (200 mm)[1]
Wafer size (alternate configuration)—200 mm[2]
Model designation alternative—5200 Centura I Phase II[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]fabsurplus.comfabsurplus.com