Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura eMXP+

Applied Materials 0041-39086 ESC Part, Applied Materials Centura eMXP+, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura eMXP+Applied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura
Specifications
Configuration—Oxide[1]
Software Version—E4.8_26[1]
Voltage—208 VAC[1]
Full load current—240A[1]
Frequency—50/60 Hz[1]
Process—Nitride Spacer[1]
Wafer size—8 inch[1]
Robot—HP+ Robot[1]
Excludes—LPT, Chiller, Dry Pump[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing