Comparison ledger
Applied Materials 0021 32427 Part, YES 253B-2-4CF-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0021 32427 PartApplied Materials | 253B-2-4CF-2YES |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0021 32427 Part | YES 253B-2-4CF-2 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Cooling Plare, Countermatch,300mm Produc[2] | — |
| Model | — | 253B-2-4CF-2[1] |
| Product name | — | MKS Type 253B Exhaust Throttle Valve[1] |
| Valve type | — | butterfly valve[1] |
| Function | — | regulates or shuts off the removal of gas from a vacuum chamber[1] |
| Compatible controllers | — | Type 651, 652, 152G, or 252 (revision D or later) controllers[1] |
| Available flange types | — | ASA, KF Style ISO, NW Style ISO, CF, JIS[1] |
| Connector | — | 15-pin Type 'D' connector[1] |
| Cable length | — | 6 in pigtail cable[1] |
| External leakage at shaft seal | — | 1 x 10-7 scc/sec He[1] |
| Materials exposed to process | — | 316L SS, Viton[1] |
| Valve body operating temperature | — | 0° to 90° C (32° to 194° F) max.[1] |
| Valve motor ambient operating temperature | — | 0° to 70° C (32° to 158° F) max.[1] |
| Resolution | — | Standard: 1/10,000; Fast Motor Option: 1/2800[1] |
| Speed (open to close) | — | Standard: 7.5 sec; Optional: < 2 sec[1] |
| Flange type for this model code | — | CF flange[1] |
| CF flange mounting flange | — | 4½ in CF[1] |
| CF flange inside diameter | — | 2.000 in (50.8 mm)[1] |
| CF flange outside diameter | — | 4.47 in (113.5 mm)[1] |
| CF flange bolt hole count | — | 6[1] |
| CF flange bolt hole diameter | — | 0.26 in (6.60 mm)[1] |
Plan your fab
Building a Lab & Support Equipment process? Get a complete equipment list.
Open the fab equipment planner →