Comparison ledger
Applied Materials 0021 20868 Part, YES 253B-1-2CF-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0021 20868 PartApplied Materials | 253B-1-2CF-2YES |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0021 20868 Part | YES 253B-1-2CF-2 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Bar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[2] | — |
| Manufacturer | — | MKS Instruments, Inc.[1] |
| Model | — | Type 253B Exhaust Throttle Valve[1] |
| Valve type | — | butterfly valve[1] |
| Function | — | regulates removal of gas from a vacuum chamber[1] |
| Controller compatibility | — | Type 651, 652, 152G, or 252 revision D or later controllers[1] |
| Available flange types | — | ASA, NW Style ISO, KF Style ISO, CF, JIS[1] |
| Electrical connector | — | 15-pin Type 'D' connector[1] |
| Cable length | — | 6 in pigtail cable[1] |
| Supply for valve body heater | — | ±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[1] |
| Valve body operating temperature | — | 0° to 90° C (32° to 194° F) max.[1] |
| Valve motor ambient operating temperature | — | 0° to 70° C (32° to 158° F) max.[1] |
| Differential pressure across valve | — | 1 atm. (15 psig) max.[1] |
| External leakage at shaft seal | — | 1 x 10-7 scc/sec He[1] |
| Materials exposed to process | — | 316L SS, Viton[1] |
| Resolution | — | Standard: 1/10,000; Fast Motor Option: 1/2800[1] |
| Speed (open to close) | — | Standard: 7.5 sec; Optional: < 2 sec[1] |
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