Waferpedia

Comparison ledger

0020 23839 PartversusSRH 530

Applied Materials 0020 23839 Part, Ulvac SRH 530, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
SRH 530Ulvac
OEMApplied MaterialsUlvac
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartUlvac SRH 530
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]—
Wafer Size—4 inch[2]
Year Built—2013[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing