Waferpedia

Comparison ledger

0020 23839 PartversusSME 200 J

Applied Materials 0020 23839 Part, Ulvac SME 200 J, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
OEMApplied MaterialsUlvac
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartUlvac SME 200 J
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]Chamber Targets:[2]
PM2—platinum[2]
PM3—bst[2]
PM4—no chamber[2]
PM5—bst[2]
PM6—bst[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing