Waferpedia

Comparison ledger

0020 23839 PartversusVCT-1800

Applied Materials 0020 23839 Part, Temescal VCT-1800, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
VCT-1800Temescal
OEMApplied MaterialsTemescal
CategoryDepositionDeposition
Wafer size—7 inches in diameter usable area
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartTemescal VCT-1800
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]fast cycle load lock, an array of sputtering sources, multi-pocket electron beam gun, and an ion source for etching and ion assisted deposition[2]
System type—thin film deposition system[2]
Substrate holder—water cooled, RF bias, rotating substrate holder[2]
Usable area—seven inches in diameter[2]
Intended use—primarily designed for R&D applications[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]tescal.comtescal.com