Waferpedia

Comparison ledger

0020 23839 PartversusEagle XP 8

Applied Materials 0020 23839 Part, ASM Eagle XP 8, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartASM Eagle XP 8
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]—
Wafer Size—300 mm (12 inch)[2]
Process Type—Plasma-Enhanced ALD (PEALD)[2]
Maximum Chambers—8 (via up to 4 Dual Chamber Modules)[2]
Chamber Configuration—Up to 4 Dual Chamber Modules (DCM)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]asm.comasm.com