Waferpedia

Comparison ledger

0020 18455 PartversusE 2000 EPI Reactor

Applied Materials 0020 18455 Part, ASM E 2000 EPI Reactor, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2008 Refurbished
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartASM E 2000 EPI Reactor
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]E 2 Upgraded to E 2000[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing