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Comparison ledger

0020 17485 PartversusAnelva EC 7001

Applied Materials 0020 17485 Part, Canon Anelva EC 7001, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMApplied MaterialsCanon
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartCanon Anelva
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]Ti, Ta, Al, W available[2]
Substrate Bias—Available[2]
Annealing Compatibility—600*C[2]
Target Size—4 inch[2]
Tool type—Sputtering system[2]
Materials available—Ti, Ta, Al, W[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing