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0010-47763 ASSY ESC Bonded Monopolar Dual HeatedversusDFL7340-stealth-dicer

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, Disco DFL7340-stealth-dicer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsDisco
CategoryPackaging & BondingPackaging & Bonding
Wafer size—200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedDisco DFL7340-stealth-dicer
Specifications
ConfigurationRefurbished[1]—
OEM—Disco[2]
Model—DFL7340[2]
Process area—Packaging[2]
Compatible materials—Dedicated to dicing Si wafers only[2]
Laser engine wavelength—λ = 1342 nm[2]
Maximum sample diameter—200 mm[2]
Dicing orientation—Topside or backside (through tape) dicing possible[2]
Si resistivity requirement—ρ > 0.01 Ω•cm[2]
Surface roughness requirement—Dicing streets must be smooth (mirror polish) on the surface where the laser is incident[2]
Street clearance requirement—Wafer must be metal-free in a width 0.4 × substrate thickness, centred on the dicing street[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca