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0010-22161 High EFF RF MatchversusSML 1500 25 25 Environmental

Applied Materials 0010-22161 High EFF RF Match, Thermotron SML 1500 25 25 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchThermotron SML 1500 25 25 Environmental
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]SML 1500 25 25 Environmental[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Air cooled[3]
Power—480V, 3Ph, 150 Amps[4]
Type—Environmental chamber[4]
Cooling—Air cooled[4]
Temperature control—Temperature control[4]
Humidity control—Humidity control[4]
Control system—Thermotron # 8800 touch screen control[3]
Software—Separate software required[3]
Recorder—Honeywell Truline recorder[3]
Temperature protection—Over and under temperature protection[3]
Included items—Viewing window, interior light, shelf[3]
Feed-thru ports—2X 6" Dia. opposing side feed-thru ports[3]
Access door—Left side access door[3]
Temperature range—-70 to +170* C[3]
Humidity range—10% to 98%[3]
OEM—Thermotron[3]
Dimensions I.D.—52"W x 35"D x 47"H[5]
Dimensions O.D.—74"W x 91"D x 97"H[5]
Fast ramp—Fast Ramp[5]
Condenser—Remote Air Cooled Condenser Included[5]
Interior—Stainless steel interior[5]
Shelves—2 shelves[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]lre.comlre.com