Waferpedia

Comparison ledger

0010-22161 High EFF RF Matchversus415 RFG

Applied Materials 0010-22161 High EFF RF Match, Tegal 415 RFG, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
415 RFGTegal
OEMApplied MaterialsTegal
Category——
Wafer size——
Process node——
Introduced——
Production run—1981–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchTegal 415 RFG
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]415 RFG[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Type—Plasma Asher[3]
Vintage—1981[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing