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0010-22161 High EFF RF MatchversusVision 2000-P™

Applied Materials 0010-22161 High EFF RF Match, MKS Vision 2000-P™, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchMKS Vision 2000-P™
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Minimum detectable concentration—<100 ppb for most common gases[3]
Gas mixture tracking—Tracks process gas mixture composition when two gases are utilized[3]
Application—Vacuum troubleshooting for fast PM recovery[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]api.p1.mks.comapi.p1.mks.com