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Comparison ledger

0010-22161 High EFF RF MatchversusSeries 49UL

Applied Materials 0010-22161 High EFF RF Match, MKS Series 49UL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2020 Release announcement
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchMKS Series 49UL
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Heater jacket material—Polyimide or Teflon[3]
Temperature range—25°C to 200°C[3]
Local LED status display—Included[3]
Low particulate generation and low VOC—Designed for low particulate generation and low VOC emissions[3]
Product type—Thermal Management System[3]
Heater jacket materials—Polyimide or Teflon heater jacket[3]
Heater jacket options—S49UL Polyimide Heater; S49UL PTFE-Woven Heater[4]
Temperature setting range—35°C to 200°C[4]
Status display—Local LED status display[3]
Communications—Modbus RTU over RS485[4]
Compliance—CE; UL 61010-1 Recognized[4]
Safety certification—UL Recognized for Measurement and Control Safety[4]
Supply voltage—100-120 VAC or 200-240 VAC, 50/60 Hz[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]api.p1.mks.comapi.p1.mks.com
  4. [4]api.p1.mks.comapi.p1.mks.com