Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusSpeed

Applied Materials 0010-22161 High EFF RF Match, Lam Research Speed, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SpeedLam Research
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchLam Research Speed
Cited variants—
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]—
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Type—High-Density Plasma Chemical Vapor Deposition (HDP-CVD)[1]
Wafer Size—8 inch[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]lamresearch.comlamresearch.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]Equipment inventory listing