Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Branson IPC 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | IPC 3000Branson |
|---|---|---|
| OEM | Applied Materials | Branson |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Branson IPC 3000 |
| Cited variants | — |
|
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | — |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Plasma Source | — | RF, 13.56 MHz[4] |
| Max RF Power | — | Up to 1200W (with ENI RF Generator or equivalent)[4] |
| Operating Pressure Range | — | 0.1 to 5 torr[5] |
| Reactor Chamber Material | — | Quartz[1] |
| Gas Flow Meter Range | — | 0 to 900 cc/min[5] |
| Input Power | — | Nominal 115V, 20A service; 15A max under load; IPC 3100 uses 208-240V 20A 3-wire circuit[5] |