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0010-21246 PartversusUnity 85 DS

Applied Materials 0010-21246 Part, Tokyo Electron Unity 85 DS, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
Unity 85 DSTokyo Electron
OEMApplied MaterialsTokyo Electron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tokyo Electron Unity
Cited variants—
  • U 2 S 855 II[1]
Specifications
Configuration—2 chamber[1]
Gas—C4F8, O2, Ar[1]
OS—Lynx[2]
Manufacturer—Tokyo Electron[2]
Model—Unity 85 DS (U 2 S 855 II)[1]
Process—Oxide etch with end point[1]
Vacuum / pumping—3ea pumps[2]
Gas delivery—C4F8, O2, Ar[2]
0010-21246 Part entryUnity 85 DS entryAsk about these tools →Share experience with this comparison →
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com