Waferpedia

Comparison ledger

0010-21246 PartversusAct 12

Applied Materials 0010-21246 Part, Tokyo Electron Act 12, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
Act 12Tokyo Electron
OEMApplied MaterialsTokyo Electron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tokyo Electron Act 12
Specifications
Configuration—2Coater 2B.L.Cot 4Developer[1]
Wafer Size—8 inch[5]
Vintage—2003
Coaters & Developers Vintage—2002
Number of Coater Modules—2[1]
Number of Bottom-Layer Coat Modules—2[1]
Number of Developer Modules—4[1]
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing