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Comparison ledger

0010-21246 PartversusExelan Flex

Applied Materials 0010-21246 Part, Lam Research Exelan Flex, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
Exelan FlexLam Research
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2018 Manufacture date
Control system——
Generation——
Family—Lam Research Exelan Flex
Cited variants—
  • 2300 Exelan Flex FX[1]
  • 2300e4 Exelan Flex GX[2]
Specifications
OEM—Lam Research[3]
Model—Exelan Flex[3]
Asset description—Lam Exelan Flex Chamber[3]
Wafer size—12 inch[3]
Configuration—2300 Exelan Flex 300mm configuration[4]
Process type—Oxide Etch[4]
Vintage—2005[4]
Tool description—2300 Exelan Flex FX - Chamber Only[1]
Current configuration—300mm[1]
Status—Available[1]
Date of manufacture—2018-01-01[2]
Configured for—To be determined[2]
Process module—2300 FLEX GX OPTIONS[2]
Sources (4)Every fact above is drawn from these public sources
  1. [1]macquarie.commacquarie.com
  2. [2]macquarie.commacquarie.com
  3. [3]Equipment inventory listing
  4. [4]solutions-on-silicon.comsolutions-on-silicon.com