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0010-21246 PartversusPfeiffer TPU 240 Turbomolecular

Applied Materials 0010-21246 Part, Balzers Pfeiffer TPU 240 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsBalzers
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Balzers Pfeiffer TPU
Cited variants—
  • TPU 240Classic Line[1]
Specifications
Volume Flow Rate—230[2]
Manufacturer—Balzers Pfeiffer[2]
Model—TPU 240[2]
Part Number—PMP01330A[1]
Condition—Refurbished[1]
High-Vacuum Inlet Flange—DN 100 CF-F (6" ConFlat Fixed)[1]
Foreline / Exhaust Flange—DN 25 ISO-KF (NW25)[1]
Pumping Speed (N2)—230 L/s[1]
Pumping Speed (He)—240 L/s[1]
Pumping Speed (H2)—210 L/s[1]
Compression Ratio (N2)—1 × 10^8[1]
Ultimate Base Pressure—≤ 1 × 10^-11 mbar (≤ 7.5 × 10^-12 Torr)[1]
Nominal Rotational Speed—60,000 RPM[1]
Ramp-Up / Start Time—≈ 1 to 3 minutes[1]
Cooling Method—Natural Convection / Forced Air / Water-Cooling (15 L/h at 15 °C)[1]
Lubricant Charge—8 cm^3 F4 / F5 Operating Fluid Wick Compatible Controllers[1]
Weight—9.0 kg (19.8 lbs)[1]
Equipment type—Turbomolecular pump[2]
Part number—PM P01 330 A (PMP01330A)[1]
Lubricant charge—8 cm3 F4 / F5 operating fluid wick compatible[1]
Compatible controllers—Pfeiffer TCP 121 / TCP 380 / TCP 300 series[1]
Make—Balzers Pfeiffer[2]
Type of product—turbo pump[3]
Inlet—6" conflat[3]
Exhaust—KF25[3]
Vent valve—fixed[3]
Pumping speed—230 l/s (N2)[3]
Compression ratio—10^8 (N2)[3]
Recommended controller—TCP-121, TCP-380[3]
Recommended backing pump—DUO 016B[3]
OEM—Balzers Pfeiffer[2]
Device type—Turbomolecular pump[2]
Sources (3)Every fact above is drawn from these public sources
  1. [1]labvac.comlabvac.com
  2. [2]inventory listing
  3. [3]provac.comprovac.com