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0010-18024 Pyrometer AssemblyversusSurfscan SP 1 DLS Particle Defect

Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan SP 1 DLS Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA Surfscan
Cited variants—
  • Surfscan SP 1 DLS Particle Defect System, 12 inch[1]
  • Surfscan SP 1 DLS Particle Defect System, 8 inch[2]
Specifications
ConfigurationCapable of working on Applied Materials Radiance[3]300mm FOUP handler[1]
Retested the CPU at bench test—CPU boots up with display but mouse and keyboard not working[1]
75mW Laser—visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.[1]
Need replacement of Bright Field laser—Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)[1]
2 loadports—1 not functioning[4]
Largest Load—26 A (Laser)[4]
Input Current—30 A, 3 Phase, 50/60 Hz[4]
Phase—3 Phase[2]
Wafer size (8 inch configuration)—8 inch[2]
Wafer size (12 inch configuration)—12 inch[1]
Input current—30 A[4]
Frequency—50/60 Hz[4]
Operating system—Windows NT[4]
Wafer handler—FOUP handler[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing