Comparison ledger
Applied Materials 0010-16392 ESC Assembly, STS Multiplex ICP Advanced Oxide, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | STS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | STS Multiplex ICP |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Voltage | — | 208 V[3] |
| Configuration | — | 80 A[3] |
| Frequency | — | 60 Hz[3] |
| RF Generators | — | ENI ACG10B 1kW (13.56MHz)[3] |
| Clamp Type | — | Standard WTC[3] |
| Platen Type | — | Domed[3] |
| Turbo Pump | — | None[3] |
| MACs Robot | — | None[3] |
| Pumping System | — | None[3] |
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