Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 9600 TCP Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 9600 TCP MetalLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research TCP 9600 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | with 3 HALO generators[3] |
| Plasma source | — | Transformer Coupled Plasma (TCP)[4] |
| Wafer size compatibility | — | 6-inch (150mm) and 8-inch (200mm)[4] |
| Chuck type | — | Ceramic ESC with helium backside cooling[4] |
| Endpoint control | — | Optical Emission Spectroscopy (OES)[4] |
| Automation interface | — | SECS/GEM Protocol[4] |
| Process chamber | — | Anodized aluminum, quartz-lined[4] |
| Typical etch targets | — | Al, TiN, Cu, W, Oxide, Nitride, Poly[4] |
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