Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 9600 Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 9600 MetalLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | Wafer chambers |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research TCP 9600 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | 9600 Metal[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Etch strip[3] |
| Wafer size | — | Wafer chambers[3] |
| Chemistry | — | BCL3, C2, SF6, HE, AR[3] |
| Operating System | — | Lam Special[3] |
| Make | — | Lam[3] |
| Category | — | Etch[4] |
| Wafer handling | — | Wafer chambers[4] |
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