Waferpedia

Comparison ledger

0010-16392 ESC Assemblyversus2300 e 5 Exelan Flex FX

Applied Materials 0010-16392 ESC Assembly, Lam Research 2300 e 5 Exelan Flex FX, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyLam Research 2300 e 5 Exelan Flex FX
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]2300 e 5 Exelan Flex FX[3]
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Product type—Etcher[3]
Make—Lam[3]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]Equipment inventory listing