Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusProducer GT

Applied Materials 0010-16392 ESC Assembly, Applied Materials Producer GT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
Producer GTApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run—2006–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyApplied Materials Producer
Cited variants—
  • Applied Materials Producer GT Etcher[1]
  • Applied Materials (AMAT) Producer GT APF[2]
Specifications
OEMApplied Materials[3]Applied Materials[5]
Model0010-16392[3]Producer GT[5]
TypeESC Assembly[3]—
Wafer Size300 mm[4]—
Electrode ConfigurationDual[4]—
Chamber A—SiCoNi[1]
Chamber B—Frontier Etch[1]
Configuration—Missing:[1]
Wafer size—12 inch[5]
Chamber names—A, B, C[2]
Current equipment status—Incoming[2]
Date of manufacture—2009-01-01[2]
Configured wafer size—300mm[2]
System power rating—110 AC 3-Phase for system[2]
Loading configuration—3 LP / 7 cooling station / 25 wafer FOUP[2]
Process capability—Advanced lithography and etch patterning down to the 22nm technology node[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]macquarie.commacquarie.com
  3. [3]Equipment inventory listing
  4. [4]spwindustrial.comspwindustrial.com
  5. [5]Equipment inventory listing
  6. [6]marketscreener.commarketscreener.com