Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura I Phase II Oxide, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Centura I Phase II OxideApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials Centura |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Upgradable to 8"[3] |
| Need to replace | — | 5-phase motor driver, indexer, turbo pump and controller, e-chuck, MFC's[3] |
| Wafer size (original) | — | 6 inch[3] |
| Wafer size (upgrade target) | — | 8 inch (200 mm)[3] |
| Wafer size (alternate configuration) | — | 200 mm[4] |
| Model designation alternative | — | 5200 Centura I Phase II[4] |
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