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0010-13627 High Efficiency RF MatchversusHX 150 Chiller

Applied Materials 0010-13627 High Efficiency RF Match, Neslab HX 150 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsNeslab
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchNeslab HX 150
Specifications
ConfigurationHE, BIAS[1]Cool Flow Refrigerated Recirculator[2]
Asset Number70430[1]—
TypeHigh Efficiency RF Match - HE, BIAS[1]Cool Flow Refrigerated Recirculator[2]
Voltage—208V - 14 Amps - Single phase 3 wire[2]
Make—Neslab[4]
Model—HX 150[4]
Refrigerant—R-22 (some units), R427A (other units)[2]
Pump type—TU-1[2]
Current—14 Amps[2]
Phase—Single phase[2]
Refrigerant configuration—Set up for R-22 or R427A[3]
Condition (example units)—Tested in working condition[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing