Comparison ledger
Applied Materials 0010-13622 RF Match for, Ulvac EBX 1000 High Vacuum Evaporation, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Ulvac |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Ulvac EBX 1000 High Vacuum Evaporation |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | Motor:[2] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Phase | — | 3 Phase[2] |
| Power | — | 5 kVA[3] |
| Voltage | — | 200V[3] |
| Frequency | — | 60 Hz[3] |
| Cryopump | — | Ulvac Cryo-U10PU[2] |
| Oil Rotary Vacuum Pump | — | Ulvac D-9500K[2] |
| Oil Mist Trap | — | Ulvac TMX-Z[2] |
| Speed Control Motor 1 | — | OM MBM 206-411[2] |
| Gear Head 1 | — | Om 2GN120K[2] |
| Speed Control Motor 2 | — | OM 5IK40RGN-A[2] |
| Gear Head 2 | — | OM 5GN60K[2] |
| Speed Controller | — | OM DSP501M[2] |
| Control Pack | — | Om SS21M-SSSD[2] |
| Ionization Vacuum Gauge Control | — | Ulvac GI-Tl3RY[2] |
| Deposition Control | — | Ulvac CRTM-9000[2] |
| Emission Control | — | Ulvac EGC-10s[2] |
| Heating Electric Power | — | Shimaden PSH-075TN[2] |
| Program Controller | — | Chino DP[2] |
| Up/Down Cylinder | — | SMC CDQ2F63-115DCM-A73[2] |
| Pressure Regulating Valve 1 | — | SMC AW4000-02BDG 0.05-0.85mpa[2] |
| Pressure Regulating Valve 2 | — | SMC AR3000-03BG-1 0.02-0.2mpa[2] |
| Check Valve 1 | — | SMC INA-14-47-02[2] |
| Check Valve 2 | — | SMC INA-14-47-04[2] |
| High Vacuum Valve 1 | — | SMC XLC-50-F9NA[2] |
| High Vacuum Valve 2 | — | SMC XLC-40-F9 NA[2] |
| Vacuum Gauge | — | Ulvac WP-01[2] |
| Vacuum Gauge Sensor | — | Ulvac WIB 2002[2] |
| Category | — | Deposition[3] |
| Tool type | — | high vacuum evaporation system[3] |
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