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0010-13622 RF Match forversusConcept Two Sequel Express

Applied Materials 0010-13622 RF Match for, Lam Research Concept Two Sequel Express, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forLam Research Concept Two
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]50/60 Hz[2]
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Phase—3 Phase[2]
Voltage—208 Vac[3]
Type—Deposition chamber[2]
Power—3 Phase[3]
Frequency—50/60 Hz[3]
Included system—Kanken Abatement System[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com