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0010-03485 Magnet AssyversusDuo 3 Vacuum

Applied Materials 0010-03485 Magnet Assy, Pfeiffer Duo 3 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
Duo 3 VacuumPfeiffer
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyPfeiffer Duo 3 Vacuum
Cited variants—
Specifications
ConfigurationWP AL 300mm PVD[2]—
OEMApplied Materials[2]—
Model0010-03485[2]Duo 3[8]
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]—
VersionSpares[5]—
Part Number0010-03485[2]—
ManufacturerApplied Materials[2]Pfeiffer[8]
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Pump type—Rotary vane pump[6]
Construction—Oil-sealed rotational displacement pump[6]
Stage—Dual-stage[7]
Variants—Duo 3 standard version, Duo 3 M, Duo 3 MC[1]
Duo 3 M difference—Magnetic coupling[1]
Duo 3 MC differences—Operating fluid F4; magnetic coupling encapsulated on the pump side; vane material changed; hose connection on the gas ballast valve; leakage rate ≤ 1 × 10-8 Pa m3/s[1]
Gas ballast / safety valve—Integrated gas ballast and safety valve[7]
Pumping speed at 50 Hz—2.5 m3/h[7]
Pumping speed at 60 Hz—2.9 m3/h[7]
Ultimate pressure with gas ballast—3 × 10-3 hPa[7]
Ultimate pressure without gas ballast—3 × 10-3 hPa[7]
Exhaust pressure, max.—1,500 hPa[7]
Rotation speed at 50 Hz—3,000 rpm[7]
Rotation speed at 60 Hz—3,600 rpm[7]
Cooling method—Air[7]
Motor version—1-ph motor[7]
Ambient temperature—12-40 °C[7]
Emission sound pressure level without gas ballast at 50 Hz—53 dB(A)[7]
Mains requirement voltage 50 Hz—230-240 V[7]
Mains requirement voltage 60 Hz—230-240 V[7]
Recommended mains fuse capacity—4 A[7]
Operating fluid—P3[7]
Operating fluid filling—0.4 l[7]
Leak rate safety valve—1 × 10-5 Pa m3/s[7]
Dimensions—309 x 129 x 222 mm[7]
Rated power 50 Hz—0.15 kW[7]
Rated power 60 Hz—0.18 kW[7]
Protection category—IP40[7]
Weight—11.3 kg[7]
Pump construction—Oil-sealed[1]
Stages—Two-stage[1]
Application range—Coarse and medium vacuum[1]
Variants stated—Standard version, M version, MC version[1]
MC version changes—Operating fluid F4, magnetic coupling encapsulated on the pump side, changed vane material, hose connection on the gas ballast valve, leakage rate ≤ 1 × 10-8 Pa m3/s[1]
Sources (8)Every fact above is drawn from these public sources
  1. [1]pfeiffervacuum.compfeiffervacuum.com
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com
  6. [6]manualslib.commanualslib.com
  7. [7]ajvs.comajvs.com
  8. [8]Equipment inventory listing