Comparison ledger
Applied Materials 0010-03485 Magnet Assy, Leybold Turbovac 50 Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03485 Magnet AssyApplied Materials | Turbovac 50 TurboLeybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-03485 Magnet Assy | Leybold Turbovac 50 Turbo |
| Cited variants | — | |
| Specifications | ||
| Configuration | WP AL 300mm PVD[3] | — |
| OEM | Applied Materials[3] | — |
| Model | 0010-03485[3] | — |
| Description | MAGNET ASSY, WP AL 300MM PVD[4] | — |
| Process | PVD[5] | — |
| Wafer size | 300mm[6] | — |
| Version | Spares[6] | — |
| Part Number | 0010-03485[3] | — |
| Manufacturer | Applied Materials[3] | — |
| Process Type | PVD (Physical Vapor Deposition)[3] | — |
| Application (Material) | Aluminum (AL)[3] | — |
| Wafer Diameter (associated) | 300 mm[3] | — |
| Pump Type | — | Turbomolecular pump with grease-lubricated bearings[2] |
| Nominal rotation speed | — | 72000 rpm[7] |
| Run-up time | — | 2 min[7] |
| Ultimate pressure | — | < 5 x 10⁻⁸ mbar[7] |
| Weight | — | 2.0 kg (4.4 lbs)[7] |
| Max. power consumption | — | 45 W[7] |
| Power consumption at ultimate pressure | — | 15 W[7] |
| Admissible ambient temperature | — | 10 to 55 °C / 50 to 131 °F[7] |
| Cooling | — | Standard convection; optional air/water[7] |
| Max. foreline pressure for N₂ | — | 1 x 10⁻¹ mbar (7.5 x 10⁻² Torr)[7] |
| Recommended foreline pump | — | TRIVAC D 2.5 E[7] |
| Pumping speed for N₂ (DN 40 inlet) | — | 33 l/s[7] |
| Pumping speed for N₂ (DN 63 inlet) | — | 55 l/s[7] |
| Gas throughput for N₂ (DN 40 inlet) | — | 0.90 mbar l/s[7] |
| Gas throughput for N₂ (DN 63 inlet) | — | 1.00 mbar l/s[7] |
| Compression ratio for N₂ | — | 2 x 10⁶[7] |
| Compression ratio for He | — | 5 x 10²[7] |
| Compression ratio for H₂ | — | 2 x 10²[7] |