Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusEpsilon E 2000 Plus

Applied Materials 0010-03485 Magnet Assy, ASM Epsilon E 2000 Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsASM
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyASM Epsilon
Specifications
ConfigurationWP AL 300mm PVD[1]RP & SiGe[5]
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Leak Detector—H2, HCL for RIKEN KEIKI[5]
SIDE CAR—H2, N2, HCL Purefire[5]
GAS—H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS[5]
MFC—Horiba STEC Z500 series[5]
Special—Veeco LOREX 15slm model included[5]
Wafer Sizes—4 inch[5]
Vintage—2011[5]
Gases—H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]inventory listing