Comparison ledger
Applied Materials 0010-03254 E Chuck, Pfeiffer TPU 062 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | TPU 062 Turbomolecular VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Pfeiffer TPU 062 Turbomolecular Vacuum |
| Specifications | ||
| Inlet flange | — | DN 63 CF-F[1] |
| Outlet flange | — | DN 16 ISO-KF[1] |
| Pumping speed (N2) | — | 56 l/s[1] |
| Final pressure | — | 1 x 10^-11[1] |
| Bearing type (high vacuum side) | — | wear free permanent magnetic bearing[1] |
| Bearing type (backing side) | — | oil lubricated ceramic bearing[1] |