Comparison ledger
Applied Materials 0010-03254 E Chuck, Nikon VMR 3020 Dimensional Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Nikon |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Nikon VMR 3020 Dimensional Measurement |
| Specifications | ||
| Type | — | Single-column X-Y stage type[1] |
| Main unit dimensions (W x D x H) | — | 625 x 728 x 1195 mm[1] |
| Controller dimensions (W x D x H) | — | 250 x 524 x 567 mm[1] |
| Joystick box dimensions (W x D x H) | — | 100 x 181 x 98 mm[1] |
| Measurement stand dimensions (W x D x H) | — | 690 x 730 x 510 mm[1] |
| Effective stroke (X-Y stage) | — | 300 x 200 mm[1] |
| Stage surface size | — | 480 x 356 mm[1] |
| Stage glass size | — | 355 x 230 mm[1] |
| Workpiece mass for precision guarantee | — | 5 kg[1] |
| Workpiece mass for load bearing capacity guarantee | — | 20 kg[1] |
| Maximum permissible mass on stage glass | — | 20 kg[1] |
| Input voltage | — | 100-120 V ±10% or 220-240 V ±10% (auto-switching)[1] |