Waferpedia

Comparison ledger

0010-03254 E ChuckversusXDS 10 Dry Scroll

Applied Materials 0010-03254 E Chuck, Edwards XDS 10 Dry Scroll, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Edwards XDS
Specifications
Voltage—200-230 V[1]
Frequency—50/60 Hz[1]
Current—2.0-2.1 A[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing