Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards E 306 A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | E 306 AEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards E 306 A |
| Specifications | ||
| Configuration | — | With a CT-200 cryopump and an Oil based Edwards roughing pump[1] |
| Tool type | — | Coater[1] |
| Vacuum & pumping | — | With a CT-200 cryopump and an oil based Edwards roughing pump[2] |
| Features | — | 2ea rotating shields that keep deposition and heat off of the belljar[1] |
| Known issue / consumable note | — | The thermal baskets need to be replaced as they are expendable items[1] |
| Included instrumentation | — | Ion gauge[1] |