Comparison ledger
Applied Materials 0010-03254 E Chuck, ASM Epsilon E 2000 Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | ASM |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | ASM Epsilon |
| Specifications | ||
| Configuration | — | RP & SiGe[1] |
| Leak Detector | — | H2, HCL for RIKEN KEIKI[1] |
| SIDE CAR | — | H2, N2, HCL Purefire[1] |
| GAS | — | H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS[1] |
| MFC | — | Horiba STEC Z500 series[1] |
| Special | — | Veeco LOREX 15slm model included[1] |
| Wafer Sizes | — | 4 inch[1] |
| Vintage | — | 2011[1] |
| Gases | — | H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS[1] |