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AIX 2600 G 3 MOCVDversus0010-13622 RF Match for

Aixtron AIX 2600 G 3 MOCVD, Applied Materials 0010-13622 RF Match for, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMAixtronApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron AIX 2600 G 3 MOCVDApplied Materials 0010-13622 RF Match for
Specifications
Configuration12*4"[1]High Efficiency HE RF Match-Bias[3]
OEMAixtron[1]—
ModelAIX 2600 G 3[1]0010-13622[3]
Equipment typeMOCVD reactor[2]—
Wafer sizes2, 3, and 4 inch[2]—
Wafer capacity8 wafers per run[2]—
Substrate materialsGaAs or InP[2]—
Hydride / metal-organic configuration7 hydrides and 8 metal-organics; or 9 hydrides and 9 metal-organics[2]—
Product Type—RF Match for PVD (Physical Vapor Deposition)[3]
Feature—High Efficiency HE RF Match-Bias[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing