Comparison ledger
Advanced Energy MDX-L12, Applied Materials 0010-22161 High EFF RF Match, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MDX-L12Advanced Energy | 0010-22161 High EFF RF MatchApplied Materials |
|---|---|---|
| OEM | Advanced Energy | Applied Materials |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Advanced Energy MDX-L12 | Applied Materials 0010-22161 High EFF RF Match |
| Specifications | ||
| Part Number | 3152313-000C[1] | — |
| Model Number | 3152313-000 B[2] | — |
| Output Power | 12 kW[3] | — |
| Type | DC Magnetron Power Supply[3] | — |
| Series | MDX-L[3] | — |
| Part Number (variant A) | 3152313-000C[1] | — |
| Part Number (variant B) | 3152313-000 B[2] | — |
| Condition | New Original (New Surplus)[3] | Used[5] |
| Control Interfaces | RS-232, GPIB, analog[3] | — |
| Core Function | High-power DC magnetron power supply for plasma and thin-film processes[3] | — |
| Make | — | Applied Materials[4] |
| Model | — | 0010-22161[4] |
| Description | — | HTESC PH 1 REV A[5] |
| Stock Number | — | BM6628[5] |