Waferpedia

Comparison ledger

UF 300 A Automatic WaferversusPrecio XL

Accretech UF 300 A Automatic Wafer, Tokyo Electron Precio XL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: Test & Probe, Unknown[1]
Side-by-side comparison of selected equipment models
Attribute
Precio XLTokyo Electron
OEMAccretechTokyo Electron
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2001 Vintage—
Control system——
Generation——
FamilyAccretech UF 300Tokyo Electron Precio
Specifications
ConfigurationNickel chuck[2]Single Open with Open Loader[1]
Phase1 Phase[2]—
Cognex board type8200[3]—
Voltage208V[3]—
OEMAccretech / TSK[2]—
ModelUF 300 A[2]Precio XL[4]
Equipment typeAutomatic Wafer Prober[2]Production Wafer Prober[6]
Wafer size8 inch[2]200 mm, 300 mm[4]
ChuckNickel chuck[2]—
Power1 Phase[2]—
Vintage2001[2]—
Keyboard/joystickKeyboard, joystick[3]—
Storage3.5" floppy disk / 3.5" hard disk[3]—
PrinterInternal printer[3]—
InterfacesGPIB I/F, RS232 I/F, Ethernet I/[3]—
FunctionsProbe mark inspection; automatic probe to pad alignment; multi-die probing up to 256 DUTs; multi function cleaning pad; automatic needle height alignment; soak time option; new E2 camera update[3]Focus OCR; hot chuck function 50~150 deg; WAPP function; 93K DD interface; flip SACC function; GPIB[1]
Chuck TypeNickel chuck (some units) or gold plated chuck (other units)[3]—
AutomationFully automatic[3]—
Probe Card ChangeIncluded[3]—
User InterfaceKeyboard, joystick, 3.5" floppy disk / hard disk, internal printer[3]—
Vision SystemCognex board type 8200, New E2 camera update[3]—
Probing FeaturesMulti-die probing up to 256 DUTs, automatic probe to pad alignment, probe mark inspection, automatic needle height alignment[3]—
CleaningMulti function cleaning pad[3]—
Soak OptionSoak time option[3]—
Hot Chuck Function—50~150 deg[1]
Manufacturer—Tokyo Electron Limited[4]
Type—Automatic wafer prober[5]
Accuracy—1.8 µm[4]
Z accuracy—5 µm[4]
Probing force—200 kg, 300 kg[4]
Stage type—Linear Motor[4]
Category—Test & Probe[6]
Main features—TELPADS-I, Auto Leveling, CoSMOz[5]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]semiconductor.directorysemiconductor.directory
  5. [5]semirai.comsemirai.com
  6. [6]waferpedia.comwaferpedia.com