Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, Laurell EDC-650, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | EDC-650Laurell |
|---|---|---|
| OEM | Accretech | Laurell |
| Category | — | — |
| Wafer size | Wafer Equipment | 100mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | Laurell EDC-650 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | — |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | — |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| Model | — | EDC-650[2] |
| Equipment name in source | — | Laurell EDC-650 Spin Processor #2 (Primary Litho)[2] |
| Wafer handling | — | Unclamped pieces (mounted on carrier wafer), 100 mm round wafers, 150 mm round wafers, 100 mm × 100 mm square wafers[2] |