Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Thermotron SML 1500 25 25 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SML 1500 25 25 EnvironmentalThermotron | |
|---|---|---|
| OEM | ABM | Thermotron |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Thermotron SML 1500 25 25 Environmental |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | SML 1500 25 25 Environmental[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | Air cooled[2] |
| Power | — | 480V, 3Ph, 150 Amps[3] |
| Type | — | Environmental chamber[3] |
| Cooling | — | Air cooled[3] |
| Temperature control | — | Temperature control[3] |
| Humidity control | — | Humidity control[3] |
| Control system | — | Thermotron # 8800 touch screen control[2] |
| Software | — | Separate software required[2] |
| Recorder | — | Honeywell Truline recorder[2] |
| Temperature protection | — | Over and under temperature protection[2] |
| Included items | — | Viewing window, interior light, shelf[2] |
| Feed-thru ports | — | 2X 6" Dia. opposing side feed-thru ports[2] |
| Access door | — | Left side access door[2] |
| Temperature range | — | -70 to +170* C[2] |
| Humidity range | — | 10% to 98%[2] |
| OEM | — | Thermotron[2] |
| Dimensions I.D. | — | 52"W x 35"D x 47"H[4] |
| Dimensions O.D. | — | 74"W x 91"D x 97"H[4] |
| Fast ramp | — | Fast Ramp[4] |
| Condenser | — | Remote Air Cooled Condenser Included[4] |
| Interior | — | Stainless steel interior[4] |
| Shelves | — | 2 shelves[4] |