Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Thermotron SE 600 15 15 Temperature, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SE 600 15 15 TemperatureThermotron | |
|---|---|---|
| OEM | ABM | Thermotron |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Thermotron SE 600 15 15 Temperature |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | SE-600-15-15[3] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Workspace Dimensions (W x D x H) | — | 40 x 26.25 x 34 inches (102 x 67 x 86 cm)[2] |
| Workspace Volume | — | 20.7 ft³ (586 L)[2] |
| Temperature Range | — | -70°C to 180°C (-94°F to 356°F)[2] |
| Temperature Uniformity | — | ±0.5°C (±0.9°F)[2] |
| Temperature Control Tolerance | — | 0.3°C (0.5°F)[2] |
| Humidity Range | — | 10% to 98% RH[2] |
| Humidity Control | — | ±2.5% RH[2] |
| Heating Performance (rate -65° to 71°C) | — | 19°C per minute[3] |
| Cooling Performance (rate 71° to -65°C) | — | 10.4°C per minute[3] |
| Heating Performance in Minutes (-65° to 71°C) | — | 11 minutes[2] |
| Heating Performance in °C/Minute (-65° to 71°C) | — | 19.4°C[2] |
| Cooling Performance in Minutes (71° to -65°C) | — | 22 minutes[2] |
| Cooling Performance in °C/Minute (71° to -65°C) | — | 10.4°C[2] |
| Electrical Requirements | — | 460V, 3PH, 70 Amps[3] |
| Approx. Shipping Weight | — | 2,115 lbs (959 kg)[2] |
| Move-In Dimensions (W x D x H) | — | 49 x 70 x 83 inches (124 x 178 x 211 cm)[2] |
| Type | — | Temperature chamber[4] |
| Interior dimensions | — | 40 in W x 26 in D x 34 in H[3] |
| Outer dimensions | — | 49 in W x 70 in D x 83 in H[3] |
| Temperature range | — | -70 to +180 °C[3] |
| Power | — | 460 V, 3 PH, 70 A[3] |